Microanalyzer, EPMA-8050G, Shimadzu

Electroprobe microanalyzer

Thanks to the application of an advanced electron-optical system with a thermofield radiation source (Schottky emitter), the microanalyzer EPMA-8050G has an unprecedented high spatial resolution of SEM images in a wide range of currents (up to 1 μA). Combined with high-performance X-ray spectrometers, an optical microscope, a dual digital scanning converter and a new workstation, the system allows you to achieve unparalleled results during microanalysis.

Features

The use of a high-performance Schottky emitter in the design of the electron gun made it possible to significantly narrow the diameter of the beam and provide ultra-high spatial resolution in the entire range of accelerating voltages.
The image resolution in secondary electrons (3 nm at an accelerating voltage of 30 kV) is the highest among EPMA systems.
A stable electron beam (maximum probe current 3 μA) allows to achieve high spatial resolution and sensitivity in the entire range of currents without the need to change the aperture of the objective.
The two-stage vacuum system ensures a constant high vacuum in the electron gun chamber and, accordingly, high beam stability, necessary for precision microanalysis.