Microanalyzer, EPMA-1720, Shimadzu

Electron probe microanalyzers

The new generation of devices for high-precision X-ray spectral analysis of nano- and micro-objects allows obtaining images of the surface in the mode of raster electron microscopy (in secondary or reflected electrons), carrying out qualitative and quantitative elemental analysis, mapping the distribution of elements by area and concentration, identification of elements in trace amounts . distribution by composition in reflected electrons, chemical state of the element and type of mechanical connection.

Features

The device implements a higher angle of registration of X-ray rays (52.5°), which is the most important condition for improving its analytical characteristics, as it provides better spatial resolution, increased sensitivity, due to less absorption of X-ray radiation, and reduces absorption when analyzing the bottom of the deepening of foreign matter in depth (high-current analysis of rough samples).

The microanalyzer is characterized by maximum stability and reproducibility, and is a reference for microanalysis. The sensitivity during the analysis of some elements reaches tens of ppm.

A built-in optical microscope with a magnification of about 540X, coaxial and confocal with an electron probe, allows simultaneous viewing of the SEM image and the optical image, which carries information about the color of the sample.

The use of highly efficient Johansson crystal analyzers in the design helps to achieve ideal convergence without aberration.
The device accommodates up to five 4-inch wave dispersion spectrometers that cover the full spectral range.